Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)

Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)

by Stephen A. Campbell

ISBN-10: 0199861226
ISBN-13: 9780199861224
Publisher: Oxford University Press
Edition: 4 - 2012

Book Description
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.