Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)
by Stephen A. Campbell
Publisher: Oxford University Press
Edition: 4 - 2012
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.